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Micromachines as tools for nanotechnology

Published by : Springer Verlag, (New Delhi:) Physical details: xii,211p.

Subject(s): Microelectromechanical systems, Nanotechnology

Year: 2003

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Item type	Current location	Call number	Status	Date due	Barcode
Books	Kuvempu University Library	620.5 (Browse shelf)	Available		81330

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