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Nanoparticle engineering for chemical - mechanical planarization: fabrication of next-generation nano-devices.

Additional authors: Park Jea-Gun.

Published by : CRC Press., (Boca Raton:) Physical details: xiii, 191 p. Year: 2009

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Item type	Current location	Collection	Call number	Status	Date due	Barcode
Books	Kuvempu University Library	Reference	620.5 (Browse shelf)	Not For Loan		84477(T)

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